VTI's high performance DUV lamps are produced by mercury-xenon plasma. The carefully controlled concen­tration and ratio of the plasma constitutuents during lamp manufacture result in maximum conversion of input power-to-output radiation. These lamps are ideally suited for several DUV photoresist formulations.

PMMA is sensitive from 210­ 260 nm; PMIPK 200-330 nm; AZ2400 Series 240-310 nm; ODVR Series 200-315 nm

APPLICATIONS

• Photolithography

• Photochemistry

• Research

• Solar simulators

• Instruments

FEATURES

• Developed for special applications in photolithography using xenon gas doped with mercury

• Specially processed electrodes to increase arc stability.

• New bulb construction to extend lamp life.

• Improved metallurgical techniques used in mechanical construction for increased reliability.

VTI LAMP MODEL NO. =>		DUV-350	DUV-500	DUV-1000	DUV-2000
Power Output	(W)	350	500	1000	2000
Operating Voltage	(V)	31-37	31-37	28-34	35-41
Current (nominal)	(A)	10.3	14.7	32.3	52.6
Overall Length	(in) (mm)	5.2	6.2	9.8	10.0
		132	157	248	254
Arc Length	(in) (mm)	0.11	0.11	0.14	0.15
		2.8	2.8	3.4	3.8
Bore Diameter	(in) (mm)	0.5	0.5	0.6	0.75
		13	13	16	19
Outside Diameter	(in) (mm)	0.9	1.0	1.5	1.8
		22	25	38	45
Base Thread		8-32	8-32	Metric 6mm x 1.0	Metric 8mm x 1.25